42.25.p. 8, 701705 (2014). Anyone you share the following link with will be able to read this content: Sorry, a shareable link is not currently available for this article. The individual column at the left of each plot indicates the case when tw=0m and gap=2.5m, for a device with full surrounding air cladding. CAS 6b). 11, 441446 (2017). 1d) to maximize the in-plane electric field Ez, while preventing potential loss induced by metal absorption, which results in a significant electro-optic tuning efficiency of 1.81GHzV1, simulated by the finite element method (see Methods for simulation details). Lithium niobate photonic-crystal electro-optic modulator Here we report high-speed and energy-efficient LN photonic-crystal EOMs, which exhibits a tiny electro-optic modal volume of only ~0.58m3, the smallest among all high-speed LN EOMs ever reported1,13,14,15,16,17,18,19,20,21,22,23,24,25,26, to the best of our knowledge. The LN photonic-crystal nanobeam has a width of w=1200nm, layer thickness of t=300nm, and a partially etched wing layer with a thickness of 150nm. Opt. Due to the high permittivity of LN at radio frequency, the commonly used full surrounding air cladding43,45,46 is not suitable for EOM since it would significantly reduce the coupling between the optical and electric fields. Scaling an EOM down to a small footprint would reduce the device capacitance and thus decrease the switching energy27,28, which is indispensable for all practical applications. 12, 1700256 (2018). Li, M. et al. & Smith, B. J. Bandwidth manipulation of quantum light by an electro-optic time lens. & Lonar, M. Monolithic ultra-high-Q lithium niobate microring resonator. Bryan Kelly on Twitter: "RT @OpticaPubsGroup: View Spotlight analysis Opt. Express 26, 220232 (2018). Our thin-film modulator (a) has an oxide layer underneath the device layer, so that velocity matching can be achieved while maximum electro-optic efficiency is maintained. 1f). J. Lightwave Technol. Res. IEEE J. Sel. a, b, Schematics of the cross-sections of thin-film (a) and conventional (b) LN modulators. 1f. Appl. A review of lithium niobate modulators for fiber-optic communications systems. a Recorded transmission spectrum of the EOM cavity as a function of applied DC voltage from 0 to 4.5V, with a voltage step of 0.5V. b Recorded resonance shift as a function of applied DC voltage, where the experimental data are shown in black dots and the blue line is a linear fitting to the data. Microstructure and domain engineering of lithium niobate crystal films Chirp in Mach-Zehnder Lithium Niobate Modulators - Optiwave Integrated lithium niobate photonics is a promising platform for the development of high-performance chip-scale optical systems, but getting a laser onto a lithium niobate chip has proved to be one of the biggest design challenges, said, , the Tiantsai Lin Professor of Electrical Engineering and Applied Physics at SEAS and senior author of the study. We have applied a voltage of 25V to the device (not shown in the figure) and did not observe any degradation. Essentially, only the 10-m long point-defect cavity requires electric driving to achieve electro-optic modulation. npj Quantum Information Hybrid Silicon and Lithium Niobate Modulator - IEEE Xplore 1e) to achieve a critical coupling. RT @OpticaPubsGroup: View Spotlight analysis of the #OPG_JOSA_B paper Spiral waveguide Bragg grating modulator on thin-film Z-cut lithium niobate http://ow.ly . When the EOM is driven at a modulation frequency of 600MHz much smaller than the cavity linewidth of 1.4GHz, increasing the driving power simply broadens the transmission spectrum into one with two shallow side lobes, as shown in Fig. Nature 528, 534538 (2015). Opt. The sum of all gray curves is showed in red, which is fitted by the theory. This value can be improved in the future by further optimizing the partially reflective photonic-crystal mirror (Fig. volume562,pages 101104 (2018)Cite this article. 4, e255 (2015). High-quality lithium niobate photonic crystal nanocavities. To date, it remains an open challenge in realizing a high-speed and energy-efficient modulator at the wavelength scale on the monolithic LN platform. M.L. Poberaj, G., Hu, H., Sohler, W. & Gnter, P. Lithium niobate on insulator (LNOI) for micro-photonic devices. a Full SEM image of the whole-device structure. Yuan, L., Xiao, M., Lin, Q. Broadband modulation of light by using an electro-optic polymer. Phys. (Credit: Second Bay Studios/Harvard SEAS). Express 20, 2246522474 (2012). Light is coupled into and out of the EOM chip via one lensed fiber. The researchers combined the laser with a 50 gigahertz electro-optic modulator in lithium niobate to build a high-power transmitter. 8 shows that there are considerable rooms to further improve the EOM performance. Optica 6, 14981505 (2019). 3 Electrical eye diagram at 100Gbaud. Optica 4, 15361537 (2017). ADS IEEE Photon. Here we overcome these limitations and demonstrate monolithically integrated lithium niobate electro-optic modulators that feature a CMOS-compatible drive voltage, support data rates up to 210 gigabits per second and show an on-chip optical loss of less than 0.5 decibels. Fortier, T. M. et al. J. Lightwave Technol. 5 Comparison of integrated and conventional LN modulators. Nat. Opt. 25, 458460 (1974). In this research, we used all the nano-fabrication tricks and techniques learned from previous developments in integrated lithium niobate photonics to overcome those challenges and achieve the goal of integrating a high-powered laser on a thin-film lithium niobate platform.. 5, 425429 (2011). carried out the device characterization. Photon. Optical waveguides are made of rib etched lithium niobate waveguides with bottom silicon oxide cladding, while SU8 polymer covers the top and sides of the rib waveguides. 8b. Ultra-low power fiber-coupled gallium arsenide photonic crystal cavity electro-optic modulator. However, negligible degradation observed between Fig. @article{Hu2023DynamicallyTS, title={Dynamically tunable single-/dual-band of the graphene absorber with a resonant asymmetric grating based on lithium niobate on insulator}, author={Jinhua Hu and Lili Sun and Lei Li and Xiuhong Liu and Danping Ren and Jijun Zhao}, journal={Optics Communications}, year={2023} } Open Access and S.C. carried out the device characterization. Extended Data Fig. Now, researchers from the Harvard John A. Paulson School of Engineering and Applied Sciences (SEAS) in collaboration with industry partners at Freedom Photonics and HyperLight Corporation, have developed the first fully integrated high-power laser on a lithium niobate chip, paving the way for high-powered telecommunication systems, fully integrated spectrometers, optical remote sensing, and efficient frequency conversion for quantum networks, among other applications. Photonics 2, 433437 (2008). Nat. Photon-level tuning of photonic nanocavities. High-speed electro-optic modulation underlies many important applications ranging from optical communication1, microwave photonics2, computing3, frequency metrology4 to quantum photonics5. Advanced optical modulation formats. Its low operating voltage makes it convenient to use a function generator as the driver. fully integrated spectrometers, optical remote sensing, and efficient frequency conversion for quantum networks, among other applications. Status and potential of lithium niobate on insulator (LNOI) for photonic integrated circuits. Abstract: In this paper, we demonstrate up to 260-GBaud single-wavelength coherent transmission by employing an optical transmitter based on two wide-bandwidth devices: a novel 260-GS/s arbitrary waveform generator with a 10-dB bandwidth of 90-GHz and a thin-film Lithium Niobate I/Q modulator with a 3-dB bandwidth of 110-GHz. Opt. Compact MZI modulators on thin film Z-cut lithium niobate All of these applications require chip-scale electro-optic modulators that operate at voltages compatible with complementary metaloxidesemiconductor (CMOS) technology, have ultra-high electro-optic bandwidths and feature very low optical losses. Miller, D. A. | 617-496-1351 | lburrows@seas.harvard.edu, Method can depict holograms viewable from any angle as if physically present with continuous depth, Nanofabrication technique, using holes to create vacuum guides, breaks a barrier in optics, Applied Physics, Optics / Photonics, Quantum Engineering, By detecting nanoscopic heat changes inside cells, first-of-their-kind sensors reveal how living systems use energy, Applied Physics, Bioengineering, Health / Medicine, Materials, 150 Western Ave, Allston, MA 02134 Lu, H. et al. The modulator utilizes spiral-shaped optical waveguides on Z-cut lithium niobate and the preeminent electro-optic effect which is applied using top and bottom electrodes. Silicon optical modulators. EDFA, erbium-doped fibre amplifier; FPC, fibre-polarization controller; MZM, MachZehnder modulator (commercial); OSA, optical spectrum analyser; VOA, variable optical attenuator. Wolf, S. et al. Winzer, P. J. Tanabe, T., Nishiguchi, K., Kuramochi, E. & Notomi, M. Low power and fast electro-optic silicon modulator with lateral p-i-n embedded photonic crystal nanocavity. C.W., M.Z. The gray curves show the created individual sidebands with Lorentzian-shape resonances and the dashed vertical lines indicates their relative frequency positions. @article{Ghosh2023WaferscaleHI, title={Wafer-scale heterogeneous integration of thin film lithium niobate on silicon-nitride photonic integrated circuits with low loss bonding interfaces}, author={Siddhartha Ghosh and Siva Yegnanarayanan and Dave Kharas and Matthew Ricci and Jason Plant and Paul W. Juodawlkis}, journal={Optics Express}, year . conceived the experiment. Upconversion of light from its fundamental wavelength (FW) to its second harmonic (SH) is enhanced 32 in micron-scale lithium niobate (LiNbO3) spheres through near-field interactions with gold . Opt. They also thank Wuxiucheng Wang, Lejie Lu, and Ming Gong for valuable discussions and help on testing. Lithium niobate piezo-optomechanical crystals. 100GHz siliconorganic hybrid modulator. Input Requirements LiNbO 3 Full Text electro optic modulator 10.1109/LPT.2021.3056913. Lithium niobate (LiNbO3) modulator can be regarded as a technology platform that can add values to optical networks and is suitable for addressing many issues. For all the recent advances in integrated lithium niobate photonic circuits from frequency combs to frequency converters and modulators one big component has remained frustratingly difficult to integrate: lasers. Laser. J. Lightwave Technol. The fully on-chip design achieves a full-swing extinction ratio of 11.5dB. Rao, A. 13, 1800228 (2019). In the meantime, to ensure continued support, we are displaying the site without styles Review and perspective on ultrafast wavelength-size electro-optic modulators. Reed, G. T., Mashanovich, G., Gardes, F. Y. Wang, C., Zhang, M., Chen, X. et al. Express 27, 1985219863 (2019). CAS 6, 488503 (2012). NTT Tech. Karpiski, M., Jachura, M., Wright, L. J. Open Access articles citing this article. Topics However, the dielectric constant of LN is ~28 at a microwave frequency, much larger than that of air. OBrien, J. L. Optical quantum computing. 1a), where an injector section (Fig. The research was co-authored by Dylan Renaud, Rebecca Cheng, Linbo Shao. The photonic-crystal hole structure was patterned with ZEP-520A positive resist via electron-beam lithography, which was then transferred to the LN layer with an Ar+ plasma milling process to etch down the full 300-nm depth. C.W., M.Z. The modulators are manufactured upon a commercial x-cut lithium niobate on isolator (LNOI) wafer (NANOLN) with a thin-film LN thickness of 500 nm, which is bonded to a buried silica (SiO 2) layer on a 500-m-thick silicon (Si) substrate. Ayata, M. et al. Integrated modulator platforms based on materials such as silicon, indium phosphide or polymers have not yet been able to meet these requirements simultaneously because of the intrinsic limitations of the materials used. Enhanced electro-optic lithium niobate photonic crystal wire waveguide on a smart-cut thin film. Optica 4, 12511258 (2017). Wang, J. et al. Koeber, S. et al. In the meantime, to ensure continued support, we are displaying the site without styles On the other hand, placing the electrode closer to the photonic-crystal cavity will strengthen as well the driving electric field inside the cavity and thus enhance the electro-optic tuning (Fig. Figure2 shows a fabricated device (see Methods for the details of device fabrication). conceived the experiment. Streshinsky, M. et al. High-performance and linear thin-film lithium niobate MachZehnder modulators on silicon up to 50GHz. Lithium niobate photonic-crystal electro-optic modulator, https://doi.org/10.1038/s41467-020-17950-7. This work was performed in part at the Cornell NanoScale Facility, a member of the National Nanotechnology Coordinated Infrastructure (National Science Foundation, ECCS-1542081). Nat. 41, 57005703 (2016). 6, 6982 (2000). Nat. If you find something abusive or that does not comply with our terms or guidelines please flag it as inappropriate. Coherent modulation up to 100 GBd 16QAM using silicon-organic hybrid (SOH) devices. Folded thin-film lithium niobate modulator based on a poled Mach The inset shows an optical microscopic image of an EOM with the RF probe in contact. For direct CMOS driving, the RF amplifier is bypassed. g Simulated optical mode field profile of the second-order TE-like cavity mode \({\mathrm{{TE}}}_{01}^{1}\). As shown in Fig. The energy efficiency of the LN photonic-crystal EOM can be further improved since our current devices are not optimized. Guarino, A., Poberaj, G., Rezzonico, D., GeglInnocenti, R. & Gnter, P. Electro-optically tunable microring resonators in lithium niobate. A 10-Gbit/s lithium niobate intensity module provides chirp-free modulation at 1550 nm. 1e and 2). Near-field enhancement of optical second harmonic generation in hybrid The broad modulation bandwidth of these devices would thus enable high-speed electro-optic switching. IEEE Photonics Technol. The orange curve in Fig. and JavaScript. The large metal pads (highlighted in blue box) are used simply as the contacts for the air-coplanar probe (Formfactor Acp65-A-GSG-100) for applying the RF driving signal (see also the inset of Fig. Integrating high-performance plug-and-play lasers would significantly reduce the cost, complexity, and power consumption of future communication systems, said Amirhassan Shams-Ansari, a graduate student at SEAS and first author of the study. the best experience, we recommend you use a more up to date browser (or turn off compatibility mode in 3, 301313 (2009). For EOM, we adopt one-dimensional photonic-crystal nanobeam as the basic underlying structure (Fig. Rao, A. et al. 1c), optimization of the photonic potential via an appropriate pattern of lattice constant (Fig. ISSN 2041-1723 (online). The metal electrode layer (10nm Ti/500 nm Au) was deposited by an electron-beam evaporator and the electrode structure was formed by a lift-off process via ZEP-520A. HR00112090012. Opt. The insertion loss from the on-chip coupling waveguide to the photonic-crystal cavity is measured to be around 2.2dB, calibrated by subtracting the facet coupling and circulator transmission loss. Photon. 3, 9194 (2009). The authors thank Professor Hui Wu and Professor Wayne Knox for the use of their equipment. Photonics 13, 454459 (2019). Q.L. This series of Lithium Niobate fiberoptic Modulators is designed for laboratory test use. Laser Photonics Rev. 28, 736739 (2016). The red column represents the parameter design used for the EOMs demonstrated in the main text. IEEE Sel Top. Mercante, A. J. et al. & Lin, Q. Quantum correlations from dynamically modulated optical nonlinear interactions. Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The extinction ratio can be significantly improved by further optimization of the photonic-crystal mirrors (Fig. 1e), with the lattice constant varying from 450 to 550nm, is designed and placed in front of the left mirror to reduce the coupling loss. b Detailed transmission spectrum of the fundamental TE-like cavity mode \({\mathrm{{TE}}}_{01}^{0}\) at a wavelength of 1554.47nm, with the experimental data shown in blue and the theoretical fitting shown in red. The blue open circles show the dielectric and air bands. The impedance of the metallic structure is optimized to minimize the coupling loss of the RF signal from the pads to the device. 20, 150157 (2014). & Wang, A. X. They are also expected to be building blocks for emerging applications such as quantum photonics5,6 and non-reciprocal optics7,8. The best-known electro-optic Pockels material is probably lithium niobate (LiNbO3, LN), which has been widely used in telecommunication1. 6a). 7, 10031013 (2019). Nature 507, 341345 (2014). Figure5b shows a clear linear dependence of the induced resonance wavelength shift on the applied voltage, from which we obtained a tuning slope of 16.0pmV1 (corresponding to a frequency tuning slope of 1.98GHzV1), close to our design. Recently, heterogeneously integrated silicon and lithium niobate (Si/LN) optical modulators have demonstrated attractive overall performance in terms of optical loss, drive voltage, and modulation bandwidth. Its a building block that can be integrated into larger optical systems for a range of applications, in sensing, lidar, and data telecommunications.. On chip, the lasers sit in small wells or trenches etched into the lithium niobate and deliver up to 60 milliwatts of optical power in the waveguides fabricated in the same platform. The electrodes are designed to have a length of 30m to ensure a full coverage of the applied electric field over the entire photonic-crystal structure.